Extreme-ultraviolet high-order harmonic pulses in the microjoule range

We study high-order harmonic generation at a high pumping energy using a long focal length lens. We identify different saturation regimes of the harmonic emission, revealing the interplay between phase matching, absorption, and laser defocusing. In the optimal conditions, high conversion efficiencies are obtained, resulting in an increase of at least one order of magnitude of the harmonic energies compared to previously reported values. In xenon, microjoule energies are reached, opening new perspectives for the applications of this ultrashort coherent radiation.